Evo Vac Multi-deposition
- 14-source multi-functional thin film deposition
- Two electron beam (4 pockets each) and four thermal evaporation, as well as DC and RF sputtering capabilities
- Sources can be used simultaneously to create in-situ alloys or multilayered thin films
- angstrom level thickness control
- Materials: Al, Al2O3, BC4, Au, Ag, Co, Cr, Fe, Si, SiO2, Mo, W, Ti, Zn, and others
Black Magic PECVD
- Aixtron Black Magic Plasma Enhanced Chemical Vapor Deposition – Room 140D
- Precision synthesis of high quality, aligned multi-walled or single-wall Carbon Nanotubes
- High rate Thermal CVD growth of Carbon Nanotube Arrays
- High rate Thermal CVD growth of Graphene