Synthesis

Evo Vac Multi-deposition

•  14-source multi-functional thin film deposition
• Two electron beam (4 pockets each) and four thermal evaporation, as well as DC and RF sputtering capabilities
• Sources can be used simultaneously to create in-situ alloys or multilayered thin films
• angstrom level thickness control
• Materials: Al, Al₂O₃, BC₄, Au, Ag, Co, Cr, Fe, Si, SiO₂, Mo, W, Ti, Zn, and others

Black Magic PECVD

• Aixtron Black Magic Plasma Enhanced Chemical Vapor Deposition – Room 140D
• Precision synthesis of high quality, aligned multi-walled or single-wall Carbon Nanotubes
• High rate Thermal CVD growth of Carbon Nanotube Arrays
• High rate Thermal CVD growth of Graphene