Synthesis

Synthesis

EvoVacEvo Vac Multi-deposition

  •  14-source multi-functional thin film deposition
  • Two electron beam (4 pockets each) and four thermal evaporation, as well as DC and RF sputtering capabilities
  • Sources can be used simultaneously to create in-situ alloys or multilayered thin films
  • angstrom level thickness control
  • Materials: Al, Al2O3, BC4, Au, Ag, Co, Cr, Fe, Si, SiO2, Mo, W, Ti, Zn, and others


20150414_104435Black Magic PECVD

  • Aixtron Black Magic Plasma Enhanced Chemical Vapor Deposition – Room 140D
  • Precision synthesis of high quality, aligned multi-walled or single-wall Carbon Nanotubes
  • High rate Thermal CVD growth of Carbon Nanotube Arrays
  • High rate Thermal CVD growth of Graphene