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Ion Assited Deposition (IAD) |
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PTCOE’s large-area IAD system allows the simultaneous co-evaporation of four materials (thermal and electron beam) and the low temperature deposition of high quality oxide materials.
Summary of IAD Capabilities
- Large-area flexible manufacturing/research tool
- Four thermal evaporation sources
- One 4-pocket e-beam evaporation source
- Can operate four sources simultaneously
- Individually shuttered sources
- Can control evaporation rates before shutters open
- Substrate temperatures to 600oC
- Uniform low voltage (40-150V), high current density plasma source
- One meter diameter deposition area
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Nanotubes
EOSL scientists are growing carbon nanotube towers atop photovoltaic
cells for longer lasting, more efficient solar power to power compact
electronic devices in the field. |
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Nano-Manhattan
pact 3D Solar cells boost efficiency while reducing size, weight and complexity of photovoltaic arrays. |
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Supercapacitors: Researchers Develop Manufacturing Technology to Produce Electrical Devices from Carbon Nanotubes
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